JPS6044405A - クリ−ンル−ム内の荷保管設備 - Google Patents
クリ−ンル−ム内の荷保管設備Info
- Publication number
- JPS6044405A JPS6044405A JP15067483A JP15067483A JPS6044405A JP S6044405 A JPS6044405 A JP S6044405A JP 15067483 A JP15067483 A JP 15067483A JP 15067483 A JP15067483 A JP 15067483A JP S6044405 A JPS6044405 A JP S6044405A
- Authority
- JP
- Japan
- Prior art keywords
- shelf
- fork
- clean room
- elevating
- conveying device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009434 installation Methods 0.000 title abstract 2
- 230000003028 elevating effect Effects 0.000 claims abstract description 12
- 238000000605 extraction Methods 0.000 claims 1
- 239000000428 dust Substances 0.000 abstract description 17
- 230000008030 elimination Effects 0.000 abstract 1
- 238000003379 elimination reaction Methods 0.000 abstract 1
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15067483A JPS6044405A (ja) | 1983-08-17 | 1983-08-17 | クリ−ンル−ム内の荷保管設備 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15067483A JPS6044405A (ja) | 1983-08-17 | 1983-08-17 | クリ−ンル−ム内の荷保管設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6044405A true JPS6044405A (ja) | 1985-03-09 |
JPH0219042B2 JPH0219042B2 (en]) | 1990-04-27 |
Family
ID=15501990
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15067483A Granted JPS6044405A (ja) | 1983-08-17 | 1983-08-17 | クリ−ンル−ム内の荷保管設備 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6044405A (en]) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS624644U (en]) * | 1985-06-25 | 1987-01-12 | ||
JPS6298740A (ja) * | 1985-10-25 | 1987-05-08 | Tokyo Electron Ltd | 半導体デバイス製造装置 |
JPS62121102A (ja) * | 1985-11-20 | 1987-06-02 | Teru Saamuko Kk | 炉処理装置 |
JPH05339802A (ja) * | 1992-02-10 | 1993-12-21 | Kanebo Ltd | カバーリングストッキング |
KR100521609B1 (ko) * | 2001-08-31 | 2005-10-13 | 가부시키가이샤 다이후쿠 | 화물취급설비 |
FR2996832A1 (fr) * | 2012-10-12 | 2014-04-18 | Sydel | Unite modulaire de stockage automatise |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58150672A (ja) * | 1982-03-03 | 1983-09-07 | ナイルス部品株式会社 | 車両用扉電動施錠解錠装置 |
-
1983
- 1983-08-17 JP JP15067483A patent/JPS6044405A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58150672A (ja) * | 1982-03-03 | 1983-09-07 | ナイルス部品株式会社 | 車両用扉電動施錠解錠装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS624644U (en]) * | 1985-06-25 | 1987-01-12 | ||
JPS6298740A (ja) * | 1985-10-25 | 1987-05-08 | Tokyo Electron Ltd | 半導体デバイス製造装置 |
JPS62121102A (ja) * | 1985-11-20 | 1987-06-02 | Teru Saamuko Kk | 炉処理装置 |
JPH05339802A (ja) * | 1992-02-10 | 1993-12-21 | Kanebo Ltd | カバーリングストッキング |
KR100521609B1 (ko) * | 2001-08-31 | 2005-10-13 | 가부시키가이샤 다이후쿠 | 화물취급설비 |
FR2996832A1 (fr) * | 2012-10-12 | 2014-04-18 | Sydel | Unite modulaire de stockage automatise |
Also Published As
Publication number | Publication date |
---|---|
JPH0219042B2 (en]) | 1990-04-27 |
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